OTFC Series
(For Edge Filters, Band Pass Filters, AR Coatings, etc.)

OTFC series, based on the ion-assisted technology, are the most
suitable coating system for producing AR coatings
and optical filters such as edge filters, band pass filters etc.

      ■ Chamber size:φ600mm - φ1800mm 
      ■ 60-point optical thickness monitor.
      ■ RF ion source achieving uniformed, larger ion beam distribution over a larger area at high ion current density.
      ■ Over 100 layers can be deposited by 2 EB guns and multi-point crucible hearth or annular hearth.
      ■ Auto-deposition control system for fully automated process.
      ■ Center-driving or planetary substrate dome is selectable.
      ■ Diffusion pumps plus Polycold or Cryo- pumps.


      OTFC-1100
Model OTFC-1100CBI/DBI
Vacuum Chamber SUS304,φ1100mm×1520mm(H)
Substrate Dome Size φ950mm
Substrate Dome Rotation Speed 10rpm to 50rpm(Variable)

Optical Film Thickness
Control System

HOM2-R-VIS350AHigh-precision Optical Monitor
Wavelength range::350nm to 1100nm
Reflection/Transmittance
Crystal Film Thickness Monitor XTC/3+6point rotary sensor
Evaporation Source EB source: 2 units
Ion Source 17cm RF Ion Source
Vacuum System Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Super Trap
 
Performance
Ultimate Pressure 7.0 × 10-5Pa or lower
Pump Down Rate 30 minutes (Atm. to 1.3 × 10-3Pa)
Substrate Heater 350℃ (max.)
 
Utility
Layout Dimensions 約5000mm(W)×6000mm(D)×3300mm(H)
Power Requirements 3-phase, 200V, 50/60Hz, 100kVA approx.
Cooling Water Flow Rate 120 /min or greater
Compressed Air Pressure 0.5MPa or greater
Gross Weight 8500kg approx.

      OTFC-1300
Model OTFC-1300CBI/DBI
Vacuum Chamber SUS304,φ1300mm×1610mm(H)
Substrate Dome Size φ1130mm
Substrate Dome Rotation Speed 10rpm to 50rpm(Variable)

Optical Film Thickness
Control System

HOM2-R-VIS350A High-precision Optical Monitor
Wavelength range: 350nm to 1100nm
Reflection/Transmittance
Crystal Film Thickness Monitor XTC/3 plus 6-point rotary sensor
Evaporation Source EB source: 2 units
Ion Source 17 cm RF ion source
Vacuum System Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Super Trap
 
Performance
Ultimate Pressure 7.0 × 10-5Pa or lower
Pump Down Rate 30 minutes (Atm. to 1.3 × 10-3Pa)
Substrate Heater 350℃ (max.)
 
Utility
Layout Dimensions 5000mm (W) × 6500mm (D) × 3500mm (H) approx.
Power Requirements 3-phase, 200V, 50/60Hz, 104kVA approx.
Cooling Water Flow Rate 140 /min. or greater
Compressed Air Pressure 0.5MPa or higher
Gross Weight 9000kg approx.

      OTFC-1550
Model OTFC-1550CBI/DBI
Vacuum Chamber SUS304,φ1550mm×1800mm(H)
Substrate Dome Size φ1400mm
Substrate Dome Rotation Speed 10rpm to 30rpm(Variable)

Optical Film Thickness
Control System

HOM2-R-VIS350A High-precision Optical Monitor
Wavelength range: 350nm to 1100nm
Reflection/Transmittance
Crystal Film Thickness Monitor XTC/3 plus 6-point rotary sensor
Evaporation Source EB source: 2 units
Ion Source 17 cm RF ion source
Vacuum System Roughing Pump, 2 Diffusion Pumps + PolycoldOr 2 Cryo Pumps + Super Trap
 
Performance
Ultimate Pressure 7.0 × 10-5Pa or lower
Pump Down Rate 20 minutes (Atm. to 1.3 × 10-3Pa)
Substrate Heater 350℃ (max.)
 
Utility
Layout Dimensions 5500mm (W) × 7200mm (D) × 3700mm (H) approx.
Power Requirements 3-phase, 200V, 50/60Hz, 120kVA approx.
Cooling Water Flow Rate 150 /min or greater
Compressed Air Pressure 0.5MPa or greater
Gross Weight 11000kg approx.

      OTFC-1300
Model OTFC-1800CBI/DBI
Vacuum Chamber SUS304,φ1800mm×1920mm(H)
Substrate Dome Size φ1600mm
Substrate Dome Rotation Speed 10 rpm to 30 rpm (Variable)

Optical Film Thickness
Control System

HOM2-R-VIS350A High-precision Optical Monitor
Wavelength range: 350nm to 1100nm
Reflection/Transmittance
Crystal Film Thickness Monitor XTC/3 plus 6-point rotary sensor
Evaporation Source EB source: 2 units
Ion Source 23 cm RF ion source
Vacuum System Roughing Pump, 2 Diffusion Pumps + PolycoldOr 2 Cryo Pumps + Super Trap
 
Performance
Ultimate Pressure 7.0 × 10-5Pa or lower
Pump Down Rate 20 min (Atm. to 1.3 × 10-3Pa)
Substrate Heater 350℃ (max.)
 
Utility
Layout Dimensions 5700mm (W) × 7700mm (D) × 4000mm (H) approx.
Power Requirements 3-phase, 200V, 50/60Hz, 150kVA approx.
Cooling Water Flow Rate 180 /min or greater
Compressed Air Pressure 0.5MPa or greater
Gross Weight 13000kg approx.

 

   Optical Thin Film Coater

   for coating on plastic substrates

 

   OTFC-L
      This optical thin film coater is newly designed for coating at plastic substrate.
      Our unique technology allows making coatings on various plastic substrates such as PMMA, Polycarbonate, Zeonex, etc.

      ■ Optimum design for coating on plastic substrates
      ■ Highquality optical films produced on plastics by special coating processes.
      ■ Passed strict environmental tests.
      ■ Automatic coating processes achieved by ACS program.

 


   OTFC-M
      This optical thin film coater is designed for producing high performance metal mirror.
      Both metallic mirrors and quality optical films can be made at high rate. Metal mirrors are resistant with
      high reflection by applying our unique technology.


      ■ Optimum design for metal mirrors.
      ■ High reflection index achieved by the exhaust system.
      ■ Passed strict environmental tests.
      ■ Automatic coating processes achieved by ACS program.

 


   OTFC-PX
      OTFC-PX, equipped with a planetary dome and ion source is suitable for coating a reflector and lenses with high curvature.


      ■ Planetary dome improves coating uniformity over substrate.
      ■ Dome angle can be inclined in accordance with lens curvature.
      ■ IAD system greatly improves film quality.
      ■ High precision spectrum property at spherical substrate can be obtained at high accuracy by optical monitor.

      ■ Large size chamber (1800 mm in diameter) with planetary dome increases productivity.

 


   OTFC-IR1
      This device is designed for infrared filter coating, and the wavelength range of the optical film thickness monitor
       is extended to 1700~5500nm against the previous version of 900~2400nm.


      ■ Optical film thickness monitor: wavelength range 1700~5500nm, wavelength resolution 3~50nm. (changeable) 
      ■ Optical film thickness monitor: light stability ±0.05% or less at infrared range.
      ■ The coater is optimized for depositing infrared filters with high performance, high quality and high reproducibility.